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Interlaboratory Study: Laser-assisted Atom Probe Tomography (APT) of a Phosporous-Doped Silicon Specimen

Published online by Cambridge University Press:  04 August 2017

Austin J. Akey  and
David C. Bell
Austin J. Akey
Affiliation:
Center for Nanoscale Systems, Harvard University, Cambridge MA, USA
David C. Bell
Affiliation:
Center for Nanoscale Systems, Harvard University, Cambridge MA, USA John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge MA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 624 - 625
Copyright
© Microscopy Society of America 2017 

References

[1] Prosa, Ty J., et al, Proceedings of the SPIE 9173, (2014), id. 917307 8 pp.Google Scholar
[2] Prosa, Tu J., et al, Ultramicroscopy 132 2013). p. 179.Google Scholar
[3] This work was performed in part at the Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Coordinated Infrastructure Network (NNCI), which is supported by the National Science Foundation under NSF award no. 1541959. CNS is part of Harvard University.Google Scholar