Published online by Cambridge University Press: 02 July 2020
For more than 20 years interfacial segregation has been studied by analytical electron microscopy (AEM). Two recent commercial developments should allow more widespread application of 1 nm resolution AEM studies of interfacial segregation. The first is a system for integrated acquisition that in its most sophisticated form allows spectrum imaging [a full spectrum recorded at every pixel of an image (e.g. STEM)] for simultaneous multiple spectroscopies (e.g., EDS and PEELS). A field emission gun (FEG) is necessary for sufficient sensitivity at high spatial resolution. The second commercial development has been imaging energy filters that allow the production of elemental maps from a series of energy-filtered TEM (EFTEM) images at inner shell ionization edges. Resolutions of ∼1 nm can be achieved without an FEG, but analysis is limited to the electron energy-loss signal. Although complex microstructures may require full two-dimensional mapping, for many planar interfaces a one-dimensional profile of composition or chemistry normal to the interface plane is sufficient.
1 Weiss, J.K.et al., Proc. Microscopy and Microanalysis 1996, 570.Google Scholar
2 Bentley, J.et al., Proc. Microscopy and Microanalysis 1996, 542.Google Scholar
3 Bentley, J.and Anderson, I.M., Proc. Microscopy and Microanalysis 1996, 532.Google Scholar
4 Anderson, I.M. and Bentley, J., these proceedings.Google Scholar
5 Bentley, J.et al., these proceedings.Google Scholar
6 Hall, E.L. and Bentley, J., Mater. Res. Soc. Symp. Proc. 458, in press .Google Scholar
7 Research at the ORNL SHaRE User Facility sponsored by the Division of Materials Sciences, U.S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp. Thanks to my collaborators: Ed Kenik, Ernie Hall (GE), and Matt Libera (Stevens Inst. Technol.).Google Scholar