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In-situ Scanning Transmission Electron Microscopy Study on the Microstructural Characterization of a TFT-LCD Panel by a FIB/SEM

Published online by Cambridge University Press:  03 August 2008

YJ Park ,
SH Han  and
HN Kim
YJ Park
Affiliation:
LG Philips LCD, Republic of Korea
SH Han
Affiliation:
LG Philips LCD, Republic of Korea
HN Kim
Affiliation:
LG Philips LCD, Republic of Korea
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1020 - 1021
Copyright
© 2008 Microscopy Society of America

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