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In-Situ Sample Preparation and Modeling of SEM-STEM Imaging

Published online by Cambridge University Press:  03 August 2008

RJ Young ,
A Buxbaum ,
B Peterson  and
R Schampers
RJ Young
Affiliation:
FEI Company
A Buxbaum
Affiliation:
FEI Company
B Peterson
Affiliation:
FEI Company
R Schampers
Affiliation:
FEI Company
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1000 - 1001
Copyright
© 2008 Microscopy Society of America

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