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Innovative Air Protection Sample Holder for Ion Milling-SEM-SPM and Shared-Alignment Sample Holder for SEM-SPM

Published online by Cambridge University Press:  25 July 2016

Ulrich Diestelhorst ,
Takehiro Yamaoka ,
Hana Tsujikawa ,
Kazunori Ando ,
Yukari Dan ,
Mari Sakaue ,
Asako Kaneko  and
Yoichiro Hashimoto
Ulrich Diestelhorst
Affiliation:
Analytical Application Engineering Section Tokyo 2, Hitachi High-Tech Science Corporation, Kawasaki, Japan
Takehiro Yamaoka
Affiliation:
Analytical Application Engineering Section Tokyo 2, Hitachi High-Tech Science Corporation, Kawasaki, Japan
Hana Tsujikawa
Affiliation:
Analytical Application Engineering Section Tokyo 2, Hitachi High-Tech Science Corporation, Kawasaki, Japan
Kazunori Ando
Affiliation:
Analytical Instruments Engineering Dept., Hitachi High-Tech Science Corporation, Oyama, Japan
Yukari Dan
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
Mari Sakaue
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
Asako Kaneko
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
Yoichiro Hashimoto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 8 - 9
Copyright
© Microscopy Society of America 2016 

References

[1] Yamaoka, T., et al., The 34th Annual NANO Testing Symposium 3 (2014). p. 13–18.Google Scholar
[2] Yamaoka, T., et al., Microscopy Today 22 (2014). p. 12–16.Google Scholar