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Influence of the N2 on TiN Thin Film Grown by PLD

Published online by Cambridge University Press:  01 August 2004

Cesar Gonzalez-Valenzuela ,
Jose Alberto Duarte-Moller ,
Wencel De la Cruz ,
Felipe Castillon Barraza ,
J. Antonio Diaz  and
Leonel Cota Araiza
Cesar Gonzalez-Valenzuela
Affiliation:
Centro de Investigacion en Materiales Avanzados, Chihuahua, México
Jose Alberto Duarte-Moller
Affiliation:
Centro de Investigacion en Materiales Avanzados, Chihuahua, México
Wencel De la Cruz
Affiliation:
UNAM, Ensenada, B.C., México
Felipe Castillon Barraza
Affiliation:
UNAM, Ensenada, B.C., México
J. Antonio Diaz
Affiliation:
UNAM, Ensenada, B.C., México
Leonel Cota Araiza
Affiliation:
UNAM, Ensenada, B.C., México
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 638 - 639
Copyright
© 2004 Microscopy Society of America

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