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Increasing the Stability and Quality of High-resolution FIB-SEM Tomography

Published online by Cambridge University Press:  30 July 2020

Tobias Volkenandt ,
Fabián Pérez Willard  and
Benjamin Tordoff
Tobias Volkenandt
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany
Fabián Pérez Willard
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany
Benjamin Tordoff
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wurttemberg, Germany

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 896 - 897
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Copyright
Copyright © Microscopy Society of America 2020