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Incoherent Stem Imaging at 1.5 Å Resolution With A 200 Kv FEGTEM

Published online by Cambridge University Press:  02 July 2020

E.M. James  and
N.D. Browning
E.M. James
Affiliation:
Department of Physics (M/C 273), University of Illinois at Chicago, 845 West Taylor Street, Chicago, Illinois60607-7059.
N.D. Browning
Affiliation:
Department of Physics (M/C 273), University of Illinois at Chicago, 845 West Taylor Street, Chicago, Illinois60607-7059.
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Extract

Here we demonstrate sub- 1.5 Å resolution in compositionally sensitive high-angle annular dark-field (HAADF) (“Z-contrast”) imaging. For the first time this has been achieved on a 200 kV field-emission transmission electron microscope (FEGTEM), the JEOL JEM-2010F. With a Gatan imaging filter, this type of instrument is then capable of both analytical imaging and electron energy-loss spectroscopy at similar spatial resolution as in the 300 kV dedicated STEM.

The Z-contrast imaging technique has a spatial resolution given by the size of the electron probe. When used to image periodic specimens and their defects, the effective incoherent nature of the Z-contrast method leads to higher resolution for given lens Cs, higher sensitivity to atomic number and easier qualitative image interpretation than in HRTEM.In practice, the ability to form a small (atomic resolution) probe depends on the brightness of the electron source, and achieving low enough levels of mechanical and electrical instabilities that otherwise incoherently broaden the probe.

Type
Compositional Imaging and Spectroscopy
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 610 - 611
Copyright
Copyright © Microscopy Society of America

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References

1.Pennycook, S.J., Jesson, D.E., McGibbon, A.J.and Nellist, P.D.J.Electron Microsc 45: (1997) 36–43.CrossRefGoogle Scholar
2.James, E.M., Browning, N.D., Nicholls, A.W., Kawasaki, M, Xin, Y. and Stemmer, SJEOL News 33 (1998) 9–14.Google Scholar
3. Research funded by NSF (DMR-9601792) and by NSF (DMR-9733895).Google Scholar