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In Situ Hydride Formation in Zirconium and Titanium during Ion Milling

Published online by Cambridge University Press:  08 August 2003

Graham J.C. Carpenter ,
Jennifer A. Jackman ,
John P. McCaffrey  and
Reza Alani
Graham J.C. Carpenter
Affiliation:
Materials Technology Laboratories, CANMET, 568 Booth Street, Ottawa, Canada, K1A 0G1
Jennifer A. Jackman
Affiliation:
Materials Technology Laboratories, CANMET, 568 Booth Street, Ottawa, Canada, K1A 0G1
John P. McCaffrey
Affiliation:
Institute for Microstructural Sciences, NRC, Ottawa, Canada K1A 0R8
Reza Alani
Affiliation:
Gatan Inc., 6678 Owens Drive, Pleasanton, CA 94588
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Abstract

Changes in microstructure of Zr, Ti, and Ti-6%Al-%V resulting from ion-beam sputtering used to prepare samples for transmission electron microscopy have been correlated with hydrogen absorption. Zr was particularly sensitive to this phenomenon, resulting in extensive hydride formation in thin foil samples. Hydrogen enrichment extending to several micrometers in depth could also be produced in bulk samples in a few hours of sputtering. The performance of various sputtering units in different configurations has been examined. It is concluded that hydride formation appears to be caused primarily by the presence of hydrocarbons, for example, from the backstreaming of diffusion pump oil, in the residual vacuum background of the sputtering chamber.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 1 , Issue 4 , August 1995 , pp. 175 - 184
Copyright
© 1995 Microscopy Society of America

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