Improving the Positional Accuracy of the Goniometer on the Philips CM200 TEM.

Extract

We have developed a system (1) for automatically acquiring large numbers of high quality transmission electron micrographs under low dose conditions. This system has been implemented on a Philips CM200 Transmission Electron Microscope equipped with a Gatan MSC CCD camera. Implementing the automated data acquisition system requires that target locations be identified in a low magnification image and then accurately located at the center of the viewing area. The magnification is subsequently increased, the image is focused on an area adjacent to the target area and the final image is acquired. Centering an identified target location for subsequent high magnification imaging typically requires moving the specimen by many thousands of nm and accurately locating the target to within a few hundred nm. This movement is too large to be achieved using the image shift coils, which would be very accurate, and instead must be achieved using the goniometer.

We have measured the accuracy of the goniometer on the Philips CM200 and the results are shown in fig 1. Data were obtained by selecting a target area from a low magnification image [660x], moving to this target and then measuring the accuracy of the requested movement by cross correlation.