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Improving the Depth Resolution of HAADF Sectioning by 3D Deconvolution

Published online by Cambridge University Press:  30 July 2020

Akimitsu Ishizuka ,
Kazuo Ishizuka ,
Ryo Ishikawa ,
Naoya Shibata ,
Yuichi Ikuhara ,
Hiroki Hashiguchi  and
Ryusuke Sagawa
Akimitsu Ishizuka
Affiliation:
HREM Research Inc., Higashimatsuyama, Saitama, Japan
Kazuo Ishizuka
Affiliation:
HREM Research Inc., Higashimatsuyama, Saitama, Japan
Ryo Ishikawa
Affiliation:
University of Tokyo, Bunkyo-ku, Tokyo, Japan
Naoya Shibata
Affiliation:
University of Tokyo, Bunkyo-ku, Tokyo, Japan
Yuichi Ikuhara
Affiliation:
University of Tokyo, Bunkyo-ku, Tokyo, Japan
Hiroki Hashiguchi
Affiliation:
JEOL Ltd., Akishima, Tokyo, Japan
Ryusuke Sagawa
Affiliation:
JEOL Ltd., Akishima, Tokyo, Japan

Abstract

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Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 3110 - 3111
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Copyright
Copyright © Microscopy Society of America 2020

References

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Ishikawa, R., Pennycook, S.J., Lupini, A.R., et al. . (2016) Appl. Phys. Lett. 109, 163102.10.1063/1.4965709CrossRefGoogle Scholar