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Improvements in Characterization of FIB Prepared Surfaces of Aluminum Using Xe+ Plasma FIB

Published online by Cambridge University Press:  04 August 2017

Brandon Van Leer  and
Rick Passey
Brandon Van Leer
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR, USA
Rick Passey
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 272 - 273
Copyright
© Microscopy Society of America 2017 

References

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[3] Hugo, R.C. & Hoagland, R.G. Scr. Mater. 41 1999). p 1341.Google Scholar