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Improved Pump Down Time with Evactron® Turbo Plasma™ Cleaning

Published online by Cambridge University Press:  04 August 2017

Ewa Kosmowska ,
Michael Cable ,
Barbara Armbruster  and
Ronald Vane
Ewa Kosmowska
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Michael Cable
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Barbara Armbruster
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Ronald Vane
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 74 - 75
Copyright
© Microscopy Society of America 2017 

References

[1] Vane, R. (2013). Microsc. Microanal. 19(2), 1338.CrossRefGoogle Scholar
[2] Kobayashi, H. (2010). J. Phy. So. JPN 53(10), 568–572.Google Scholar