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Improved Background Removal Method Using Principal Components Analysis for Spatially Resolved Electron Energy Loss Spectroscopy

Published online by Cambridge University Press:  28 January 2005

Niclas Borglund ,
Per-Gustav Åstrand  and
Stefan Csillag
Niclas Borglund
Affiliation:
Stockholm University, Department of Physics, S-106 91 Stockholm, Sweden
Per-Gustav Åstrand
Affiliation:
Stockholm University, Department of Physics, S-106 91 Stockholm, Sweden
Stefan Csillag
Affiliation:
Stockholm University, Department of Physics, S-106 91 Stockholm, Sweden
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Abstract

Principal components analysis (PCA) factor filtering is implemented for the improvement of background removal in noisy spectra. When PCA is used as a method for filtering before background removal in electron energy loss spectroscopy elemental maps, an improvement in the accuracy of the background fit with very short fitting intervals is achieved, leading to improved quality of elemental maps from noisy spectra. This opens the possibility to use shorter exposure times for elemental mapping, leading to fewer problems with, for example, drift and beam damage.

Keywords

electron energy loss spectroscopybackground removalprincipal components analysis
Type
INSTRUMENTATION AND TECHNIQUES
Information
Microscopy and Microanalysis , Volume 11 , Issue 1 , February 2005 , pp. 88 - 96
Copyright
© 2005 Microscopy Society of America

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References

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