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Imaging of Bio-Compatible Polymers in the Helium Ion Microscope

Published online by Cambridge University Press:  01 August 2010

J Notte ,
L Farkas ,
L Scipioni  and
I Smith
J Notte
Affiliation:
Carl Zeiss SMT Inc
L Farkas
Affiliation:
Carl Zeiss SMT Inc
L Scipioni
Affiliation:
Carl Zeiss SMT Inc
I Smith
Affiliation:
University of Michigan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 200 - 201
Copyright
Copyright © Microscopy Society of America 2010