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Identification and Analysis of Fluorine Clustering in Boron Implants

Published online by Cambridge University Press:  03 August 2008

DA Reinhard ,
D Lawrence ,
RA Alvis  and
P Ronsheim
DA Reinhard
Affiliation:
Imago Scientific Instruments
D Lawrence
Affiliation:
Imago Scientific Instruments
RA Alvis
Affiliation:
Imago Scientific Instruments
P Ronsheim
Affiliation:
IBM Corporation East Fishkill
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1250 - 1251
Copyright
© 2008 Microscopy Society of America

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