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Hyperspectroscopic Photoluminescence Imaging of Si Micropillar Arrays

Published online by Cambridge University Press:  30 July 2020

Yang Qian ,
David Magginetti  and
Heayoung Yoon
Yang Qian
Affiliation:
University of Utah, Salt Lake City, Utah, United States
David Magginetti
Affiliation:
University of Utah, Salt Lake City, Utah, United States
Heayoung Yoon
Affiliation:
University of Utah, Salt Lake City, Utah, United States

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Correlation of Spectroscopic Methods with Microanalysis
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 526 - 529
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Copyright
Copyright © Microscopy Society of America 2020

References

Huang, Z., Geyer, , et al. , Metal-Assisted Chemical Etching of Silicon: A Review. Adv. Mater. 23, 285–308 (2011).10.1002/adma.201001784CrossRefGoogle ScholarPubMed
Azeredo, B. P. et al. , Direct Imprinting of Porous Silicon via Metal-Assisted Chemical Etching. Adv. Funct. Mater. 26, 2929–2939 (2016).10.1002/adfm.201505153CrossRefGoogle Scholar
Barabana, A.P., et al. , Luminescence of SiO2 layers on silicon at various types of excitation, J. of Luminescence 205, 102–108 (2019).10.1016/j.jlumin.2018.09.009CrossRefGoogle Scholar
Acknowledgment: This work made use of the University of Utah USTAR shared facilities support, in part, by the MRSEC Program of NSF under Award No. DMR-1121252. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science by Los Alamos National Laboratory (Contract 89233218CNA000001) and Sandia National Laboratories (Contract DE-NA-0003525). We thank M. Wang and Prof. J. Gerton for their support on the PL measurements, and Dr. J. Lee and D. Stowe for valuable discussions.Google Scholar