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How New Electron Detector Concepts Can Help to Increase Throughput and Sensitivity of Single-and Multi-Beam Scanning Electron Microscopes

Published online by Cambridge University Press:  25 July 2016

A. Liebel ,
G. Lutz ,
U. Weber ,
M. Schmid ,
A. Niculae  and
H. Soltau
A. Liebel
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany
G. Lutz
Affiliation:
PNSensor GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany
U. Weber
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany
M. Schmid
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany
A. Niculae
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany
H. Soltau
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, D-81739 München, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 598 - 599
Copyright
© Microscopy Society of America 2016 

References

[1] Liebel, A., et al., Microscopy & Microanalysis (Vol. 20(S3 (2014). pp. 28–29.CrossRefGoogle Scholar