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High-Throughput SEM via Multi-Beam SEM: Applications in Materials Science

Published online by Cambridge University Press:  23 September 2015

Joseph R. Michael ,
Craig Y. Nakakura ,
Tomasz Garbowski ,
Anna Lena Eberle ,
Thomas Kemen  and
Dirk Zeidler
Joseph R. Michael
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Craig Y. Nakakura
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Tomasz Garbowski
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Anna Lena Eberle
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Thomas Kemen
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Dirk Zeidler
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 697 - 698
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Keller, A. L., et al, Proc. of SPIE 9236 (2014). 92360B-1.Google Scholar
[2] Eberle, A. L., et al, Microscopy (Tokyo) 63(2104), 1.Google Scholar
[3] Eberle, A. L., et al, J. Microsc. Accepted for publication 2015.Google Scholar
[4] http://www.brukerafmprobes.com/a-3553-scmsample.aspx.Google Scholar
[5] Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy (DOE) under contract DE-AC0494AL85000..Google Scholar