Hostname: page-component-78c5997874-m6dg7 Total loading time: 0 Render date: 2024-11-04T20:18:53.652Z Has data issue: false hasContentIssue false
  • English
  • Français

High-Resolution Confocal Microscopy with Simultaneous Electron and Laser Beam Irradiation

Published online by Cambridge University Press:  05 December 2012

Jonathan Poplawsky  and
Volkmar Dierolf
Jonathan Poplawsky*
Affiliation:
Lehigh University, Physics, 16 Memorial Drive East, Bethlehem, PA 18015, USA
Volkmar Dierolf
Affiliation:
Lehigh University, Physics, 16 Memorial Drive East, Bethlehem, PA 18015, USA
*
*Corresponding author. E-mail: [email protected]
Get access

Abstract

We have developed a fiber-based confocal optical microscope that operates inside of a commercial scanning electron microscope (SEM) instrument (JEOL 6400; JEOL Ltd., Tokyo, Japan) enabling the excitation of a sample either by a laser or by electron beam, and hence combining the complimentary techniques of photoluminescence and cathodoluminescence. The instrument uses single-mode fibers that enter the SEM by vacuum feedthroughs. The illumination and collection fibers operate as effective pinholes providing, in combination with a microscope objective (NA = 0.3), high spatial resolution (~2 μm) and excellent collection efficiency. The high spatial resolution ensures that the light collected from the sample is in a region of optimal laser beam and electron beam overlap. The capabilities of this instrument are tested by experiments involving the excitation of europium ions in situ doped in GaN thin films.

Keywords

cathodoluminescephotoluminescencescanning electron microscopeconfocal microscopenumerical apertureeuropiumgallium nitride
Type
Special Section: Cathodoluminescence
Information
Microscopy and Microanalysis , Volume 18 , Issue 6 , December 2012 , pp. 1263 - 1269
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Bergman, L. & McHale, J. (2012). Handbook of Luminescent Semiconductor Materials. Boca Raton, FL: CRC Press.Google Scholar
Born, M. & Wolf, E. (1999). Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 7th ed. Cambridge, UK: Cambridge University Press.Google Scholar
MacRae, C., Wilson, N., Johnson, S., Philips, P. & Otsuki, M. (2005). Hyperspectral mapping—Combining cathodoluminescence and X-ray collection in an electron microprobe. Microsc Res Techniq 67(5), 271–277.Google Scholar
Marshall, D. & Mariano, A. (1988). Cathodoluminescence of Geological Materials. Boston, MA: Unwin Hyman.Google Scholar
Nishikawa, A., Kawasaki, T., Furukawa, N., Terai, Y. & Fujiwara, Y. (2010). Electroluminescence properties of Eu-doped GaN-based red light-emitting diode by OMVPE. Phys Status Solidi A 207(6), 1397–1399.Google Scholar
Nutt, A.C.G., Gopalan, V. & Gupta, M.C. (1992). Domain inversion in LiNbO3 using direct electron beam writing. Appl Phys Lett 60(23), 2828–2830.CrossRefGoogle Scholar
Poplawsky, J., Woodward, N., Nishikawa, A., Fujiwara, Y. & Dierolf, V. (2011). Nature and excitation mechanism of the emission-dominating minority Eu-center in GaN Grown by organometallic vapor-phase epitaxy. Mater Res Soc Symp Proc 1342, 21–26.Google Scholar
Stone, G., Knorr, B., Gopalan, V. & Dierolf, V. (2011). Frequency shift of Raman modes due to an applied electric field and domain inversion in LiNbO3 . Phys Rev B 84(13), 134303–134309.Google Scholar
Wilson, T. & Carlini, A.R. (1987). Size of the detector in confocal imaging systems. Opt Lett 12, 227–229.CrossRefGoogle ScholarPubMed
Yacobi, B. & Holt, D. (1990). Cathodoluminescence Microscopy of Inorganic Solids. New York: Plenum Press.CrossRefGoogle Scholar