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High-Accuracy Sample Preparation for Three Dimensional Atom Probe Tomography Using Orthogonal Column Layout FIB-SEM and its STEM function

Published online by Cambridge University Press:  01 August 2018

Miki Tsuchiya ,
Yoshihisa Orai ,
Takahiro Sato ,
Xin Man ,
Junichi Katane  and
Tsuyoshi Onishi
Miki Tsuchiya
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Yoshihisa Orai
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Takahiro Sato
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Xin Man
Affiliation:
Hitachi High-Tech Science corp., Beam Technology Systems Design Group 1, Oyama-cho, Japan
Junichi Katane
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Tsuyoshi Onishi
Affiliation:
Hitachi High-Technologies corp., Science System Sales & Marketing Div., Tokyo, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 830 - 831
Copyright
© Microscopy Society of America 2018 

References

[1] Miller, M. K, etal, Microsc.Microanal 13 2007) p. 428.Google Scholar
[2] Man, X., etal, Mcros.Microanal 20(Suppl 3 2014) p. 354.Google Scholar
[3] Tsuchiya, M, et al, Proceedings of the 73rd Annual meeting of JSM2017 52 2017) p. 88.Google Scholar