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High Speed, Large Scan Area, Distortion Free Operation of a Single-Chip Scanning Probe Microscope

Published online by Cambridge University Press:  25 July 2016

N. Sarkar ,
G. Lee ,
D Strathearn ,
M. Olfat  and
R.R. Mansour
N. Sarkar
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
G. Lee
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
D Strathearn
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
M. Olfat
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
R.R. Mansour
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 372 - 373
Copyright
© Microscopy Society of America 2016 

References

REFERENCES:

[1] Sarkar, N., et al, “CMOS-MEMS atomic force microscope,” Proceedings of Transducers 2011.CrossRefGoogle Scholar
[2] Barret, R.C. & Quate, C. JVST B 9(2 (1991). pp. 302–306.Google Scholar
[3] Ando, T., et al, Proc. Natl. Acad. Sci v98, n22 2001). pp. 12468–12472.CrossRefGoogle Scholar
[4] Bozchalooi, ■., et al, Ultramicroscpy v160 (2016) p213.CrossRefGoogle Scholar
[5] Strathearn, D., et al, Proceedings of Transducers 2015.Google Scholar
[6] Sarkar, N., et al, proceedings of MEMS 2016.Google Scholar