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High Speed, Large Scan Area, Distortion Free Operation of a Single-Chip Scanning Probe Microscope
Published online by Cambridge University Press: 25 July 2016
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- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 372 - 373
- Copyright
- © Microscopy Society of America 2016
References
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[1]
Sarkar, N., et al,
“CMOS-MEMS atomic force microscope,” Proceedings of Transducers 2011.CrossRefGoogle Scholar
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