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High Spatial Resolution Spectroscopy in a FE-SEM: X-ray Microanalysis and Electron Energy-Loss Spectroscopy

Published online by Cambridge University Press:  04 August 2017

Hendrix Demers ,
Nicolas Brodusch  and
Raynald Gauvin
Hendrix Demers
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Nicolas Brodusch
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Raynald Gauvin
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1044 - 1045
Copyright
© Microscopy Society of America 2017 

References

[1] Sunaoshi, T., et al, Microscopy and Microanalysis 22 2016). pp. 604–605.Google Scholar
[2] Yamazawa, Y., et al, Microscopy and Microanalysis 22 2016). pp. 50–51.Google Scholar
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[4] Kim, J., et al, Journal of Vacuum Science Technology B 25 2007). pp. 1771–1775.Google Scholar
[5] This work was supported by Hitachi High-Technologies Canada Inc.Google Scholar