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High Reproducible Scanning Near-field Optical Microscopy with a Few Nanometer Lateral Spatial Resolution

Published online by Cambridge University Press:  25 July 2016

Takehiro Tachizaki ,
Keifeng Zhang ,
Ichiro Yamakawa  and
Shin-ichi Taniguchi
Takehiro Tachizaki
Affiliation:
School of Engineering, Tokai University, Hiratsuka, Japan
Keifeng Zhang
Affiliation:
Research & Development Group, Center for Technology Innovation - Production Engineering, Hitachi, Ltd., Yokohama, Japan
Ichiro Yamakawa
Affiliation:
Research & Development Group, Center for Technology Innovation - Production Engineering, Hitachi, Ltd., Yokohama, Japan
Shin-ichi Taniguchi
Affiliation:
Research & Development Group, Center for Technology Innovation - Production Engineering, Hitachi, Ltd., Yokohama, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 362 - 363
Copyright
© Microscopy Society of America 2016 

References

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[4] Born, M. & Wolf, E. “Principles of Optics”. Cambridge University Press (1999).Google Scholar