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High Depth Resolution Auger Depth Profiling Analysis Using Inclined Holder

Published online by Cambridge University Press:  01 August 2010

T Ogiwara ,
T Nagatomi  and
S Tanuma
T Ogiwara
Affiliation:
National Institute for Materials Science, Japan
T Nagatomi
Affiliation:
Osaka University, Japan
S Tanuma
Affiliation:
National Institute for Materials Science, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 440 - 441
Copyright
Copyright © Microscopy Society of America 2010