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A High Brightness Plasma Source for Focused Ion Beam Applications

Published online by Cambridge University Press:  05 August 2007

NS Smith ,
DE Kinion ,
PP Tesch  and
RW Boswell
NS Smith
Affiliation:
FEI Company
DE Kinion
Affiliation:
FEI Company
PP Tesch
Affiliation:
FEI Company
RW Boswell
Affiliation:
Australian National University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 180 - 181
Copyright
© 2007 Microscopy Society of America

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