Published online by Cambridge University Press: 02 July 2020
Since the original observations by Duncumb in 1962, a number of studies have been conducted on the effects of electron channel on characteristic x-ray emission and microanalysis. Most of the recent studies have concentrated upon using the phenomenon to perform site specific distributions of impurity elements in ordered compounds using the ALCHEMI methodology. Very few studies have attempted to accurately measure the effect as a function of orientation and compare these results to theory. In this study, two dimensional high angular resolution studies of channeling enhance x-ray emission were performed and herein the results are compared to theoretical calculations of Allen etal.
All experimental measurements presented here were conducted on a Philips EM 420T analytical electron microscope. The instrument was operated in the TEM mode, at 120 kV using an LaB6 electron source. The characteristic x-ray emission was measured using an EDAX ultra thin window Si(Li) detector having a FWHM of ∼ 145 eV at Mn Kα.