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Having Your Cake and Eating It Too: A Procedure for Obtaining Plan View and Cross Section TEM Images from the Same Site

Published online by Cambridge University Press:  01 August 2004

R. B. Irwin ,
A. Anciso ,
P.J. Jones  and
C. Patton
R. B. Irwin
Affiliation:
Texas Instruments Inc., MAKE Engineering Analog Physical Failure Analysis Laboratory, Dallas, Texas
A. Anciso
Affiliation:
Texas Instruments Inc., MAKE Engineering Analog Physical Failure Analysis Laboratory, Dallas, Texas
P.J. Jones
Affiliation:
Texas Instruments Inc., MAKE Engineering Analog Physical Failure Analysis Laboratory, Dallas, Texas
C. Patton
Affiliation:
Texas Instruments Inc., MAKE Engineering Analog Physical Failure Analysis Laboratory, Dallas, Texas
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1146 - 1147
Copyright
© 2004 Microscopy Society of America

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