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Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon Contamination

Published online by Cambridge University Press:  01 August 2005

A D Garetto ,
D D Griffis ,
P E Russell ,
P D Rack  and
J Fowlkes
A D Garetto
Affiliation:
North Carolina State University
D D Griffis
Affiliation:
North Carolina State University
P E Russell
Affiliation:
North Carolina State University
P D Rack
Affiliation:
University of Tennessee
J Fowlkes
Affiliation:
University of Tennessee

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 850 - 851
Copyright
© 2005 Microscopy Society of America