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Growth Mechanism of (111)-Textured 3C-SiC Films on Si(100) Substrates

Published online by Cambridge University Press:  21 July 2003

V. Radmilovic ,
Di Gao ,
R. Maboudian  and
U. Dahmen
V. Radmilovic
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley National Laborator
Di Gao
Affiliation:
Department of Chemical Engineering, University of California, Berkeley, CA 9472
R. Maboudian
Affiliation:
Department of Chemical Engineering, University of California, Berkeley, CA 9472
U. Dahmen
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley National Laborator

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 664 - 665
Copyright
Copyright © Microscopy Society of America 2003