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Geometric Limits on Spatial Resolution for Cs Corrected STEM Analysis of Thick TEM Lamellae

Published online by Cambridge University Press:  01 August 2010

J Bruley  and
J Ringnalda
J Bruley
Affiliation:
IBM
J Ringnalda
Affiliation:
FEI Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 150 - 151
Copyright
Copyright © Microscopy Society of America 2010