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Formation of markers by a helium ion microscope for TEM tomography

Published online by Cambridge University Press:  23 November 2012

M. Hayashida ,
T. Iijima ,
M. Tsukahara ,
T. Fujimoto  and
S. Ogawa
M. Hayashida
Affiliation:
AIST, Tsukuba, Japan
T. Iijima
Affiliation:
AIST, Tsukuba, Japan
M. Tsukahara
Affiliation:
AIST, Tsukuba, Japan
T. Fujimoto
Affiliation:
AIST, Tsukuba, Japan
S. Ogawa
Affiliation:
AIST, Tsukuba, Japan
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 558 - 559
Copyright
Copyright © Microscopy Society of America 2012

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