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Focused Ion Beam Sample Preparation of Complex Devices

Published online by Cambridge University Press:  01 August 2005

P E Russell ,
K L Bunker ,
R Garcia ,
T J Stark  and
J P Vitarelli
P E Russell
Affiliation:
North Carolina State University
K L Bunker
Affiliation:
North Carolina State University
R Garcia
Affiliation:
North Carolina State University
T J Stark
Affiliation:
Materials Analytical Services
J P Vitarelli
Affiliation:
Materials Analytical Services

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 88 - 89
Copyright
© 2005 Microscopy Society of America