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Focused Ion Beam Preparation Techniques for EFTEM Analysis

Published online by Cambridge University Press:  24 July 2003

P. Gnauck ,
U. Zeile ,
G. Benner ,
A. Orchowski  and
W-D. Rau
P. Gnauck
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany
U. Zeile
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany
G. Benner
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany
A. Orchowski
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany
W-D. Rau
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73447 Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 872 - 873
Copyright
Copyright © Microscopy Society of America 2003