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Focused Ion Beam Lithography of Nanophotonic Structures

Published online by Cambridge University Press:  23 November 2012

J.E. Sanabia ,
A. Nadzeyka ,
S. Bauerdick ,
L. Peto  and
F. Nouvertné
J.E. Sanabia
Affiliation:
RaithUSA, Inc., Ronkonkoma, NY
A. Nadzeyka
Affiliation:
Raith GmbH, Dortmund, Germany
S. Bauerdick
Affiliation:
Raith GmbH, Dortmund, Germany
L. Peto
Affiliation:
Raith GmbH, Dortmund, Germany
F. Nouvertné
Affiliation:
Raith GmbH, Dortmund, Germany
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 612 - 613
Copyright
Copyright © Microscopy Society of America 2012

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