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Fixturing Options for Atom Probe Tomography

Published online by Cambridge University Press:  30 July 2020

Katherine Rice ,
Yimeng Chen ,
Robert Ulfig  and
Tsuyoshi Onishi
Katherine Rice
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Yimeng Chen
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Robert Ulfig
Affiliation:
CAMECA Instruments, Inc., Madison, Wisconsin, United States
Tsuyoshi Onishi
Affiliation:
Hitachi High-Tech Corporation, Tokyo, Tokyo, Japan

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2710 - 2711
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Copyright
Copyright © Microscopy Society of America 2020

References

Larson, D. J., et al. “Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures.” Nanotechnology 10.1 (1999): 45.10.1088/0957-4484/10/1/010CrossRefGoogle Scholar
Gorman, Brian P., et al. “Hardware and techniques for cross-correlative TEM and atom probe analysis.” Microscopy Today 16.4 (2008): 42–47.10.1017/S1551929500059782CrossRefGoogle Scholar