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FIB Target Preparation for 20 kV STEM - A Method for Obtaining Ultra-Thin Lamellas

Published online by Cambridge University Press:  08 April 2017

L Lechner
Affiliation:
Ulm University, Germany
J Biskupek
Affiliation:
Ulm University, Germany
U Kaiser
Affiliation:
Ulm University, Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011