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FIB Preparation of Mesa Structures for SIMS Analysis

Published online by Cambridge University Press:  01 August 2002

J. M. McKinley ,
B. B. Rossie ,
M. A. Decker  and
F. A. Stevie
J. M. McKinley
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
B. B. Rossie
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
M. A. Decker
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
F. A. Stevie
Affiliation:
North Carolina State University, 1010 Main Campus Drive, Box 7531, Raleigh, NC 27695

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 542 - 543
Copyright
Copyright © Microscopy Society of America 2002