FIB Dual-Beam Sample Preparation for TEM Observation

Geoffroy Auvert

doi:10.1017/S1431927603444358

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FIB Dual-Beam Sample Preparation for TEM Observation

Published online by Cambridge University Press: 24 July 2003

Geoffroy Auvert

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Geoffroy Auvert*: Affiliation:
STMicroelectronics, CEA-LETI-SCPC, 17 rue des martyrs, 38054 Grenoble, Cedex, France

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 870 - 871

DOI: https://doi.org/10.1017/S1431927603444358 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2003

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FIB Dual-Beam Sample Preparation for TEM Observation

Volume 9, Issue S02
Geoffroy Auvert ^(a1)
DOI: https://doi.org/10.1017/S1431927603444358

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FIB Dual-Beam Sample Preparation for TEM Observation

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