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Fabrication of Ge On Insulator By Ion-Implantation And Dry Oxidation Techniques

Published online by Cambridge University Press:  23 November 2012

T. Kim ,
D.J. Llewellyn ,
K. Belay ,
R. Elliman ,
D. Choi  and
B. Luther-Davies
T. Kim
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
D.J. Llewellyn
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
K. Belay
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
R. Elliman
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
D. Choi
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
B. Luther-Davies
Affiliation:
Centre for Advanced Microscopy, Australian National University, Canberra, Australian Capital Territory, Australia
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1634 - 1635
Copyright
Copyright © Microscopy Society of America 2012

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