Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-25T02:47:57.846Z Has data issue: false hasContentIssue false
  • English
  • Français

Experiments in Astigmatism Detection and Correction Techniques for the SEM

Published online by Cambridge University Press:  30 July 2020

Richard Roebuck ,
Bernard Breton ,
David Holburn  and
Nicholas Caldwell
Richard Roebuck
Affiliation:
BT plc, Ipswich, England, United Kingdom
Bernard Breton
Affiliation:
University of Cambridge, Cambridge, England, United Kingdom
David Holburn
Affiliation:
University of Cambridge, Cambridge, England, United Kingdom
Nicholas Caldwell
Affiliation:
University of Suffolk, Ipswich, England, United Kingdom

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2124 - 2125
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Goldstein, J. et al. , (2003) Scanning Electron Microscopy, 3rd Edn, New York: SpringerGoogle Scholar
Ong, K.H., Phang, J.C.H. and Thong, J.T.L., (1997), Scanning, 19, p. 553Google Scholar
Lu, Y., Zhang, X., and Li, H.. (2018). A simplified focusing and astigmatism correction method for a scanning electron microscope. AIP Advances, [online] 8(1), p.015124.10.1063/1.5009683CrossRefGoogle Scholar
Erasmus, S.J. and Smith, K.C.A. (1982). An automatic focusing and astigmatism correction system for the SEM and CTEM. Journal of Microscopy, 127(2), pp. 185–19910.1111/j.1365-2818.1982.tb00412.xCrossRefGoogle Scholar
Batten, C.F. (2000). Autofocusing and Astigmatism Correction in the Scanning Electron Microscope, MPhil Thesis, University of CambridgeGoogle Scholar
Caldwell, N.H.M. et al. , Microsc. Microanal. 19 (Suppl S2) (2013), p. 77410.1017/S1431927613005862CrossRefGoogle Scholar
SmartSEM™ is a trademark of Carl Zeiss Microscopy. This research was supported by funding from Carl Zeiss Microscopy and the in-kind support of the first author by BT plc. The authors gratefully acknowledge the assistance of Carl Zeiss personnel in undertaking this research.Google Scholar