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Experimental Results Using a Low-Energy Focussed Ion Beam Column With Minimised Coulomb Interaction

Published online by Cambridge University Press:  28 September 2015

Karin Marianowski  and
Erich Plies

Abstract

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Type
Ion Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 100 - 105
Copyright
Copyright © Microscopy Society of America 2015 

References

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