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Experimental Results Using a Low-Energy Focussed Ion Beam Column With Minimised Coulomb Interaction

Published online by Cambridge University Press:  28 September 2015

Abstract

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Type
Ion Optics
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1]Narum, DH & Pease, RFW, J. Vac. Sci. Technol. B 6 (1988). p. 966.CrossRefGoogle Scholar
[2]Kasahara, H, et al, J. Vac. Sci. Technol. B 6 (1988). p. 974.CrossRefGoogle Scholar
[3]Sawaragi, H, et al, J. Vac. Sci. Technol. B 8 (l990). p. 1848.CrossRefGoogle Scholar
[4]Nagamachi, S, et al, Appl. Phys. Lett 62 (1993). p. 2143.CrossRefGoogle Scholar
[5]Yanagisawa, J, et al, J. Vac. Sci. Technol. B 13 (1995). p 2621.CrossRefGoogle Scholar
[6]Nebiker, PW, et al, Nucl. Instr. Meth. B 113 (1996). p 205.CrossRefGoogle Scholar
[7]Orloff, J, Microel. Engin. 6 (1987). p. 327.CrossRefGoogle Scholar
[8]Driesel, W, Ultramicroscopy 52 (1993). p. 65.CrossRefGoogle Scholar
[9]Chikyow, T, et al, Surf. Sci. 386 (1997). p. 254.CrossRefGoogle Scholar
[10] P Gnauck, dissertation, Tübingen, 2000.Google Scholar
[11] M Rauscher, dissertation, Tübingen, 2006.Google Scholar
[12] K Marianowski, diploma thesis, Tübingen, 2006.Google Scholar
[13]Marianowski, K, et al, Nucl. Instr. Meth. A 645 (2011). p 116.CrossRefGoogle Scholar
[14] Software by Mebs Ltd., London, www.mebs.co.uk.Google Scholar
[15]Barth, JE & Kruit, P, Optik 101 (1996). p. 101.Google Scholar
[16]Kruit, P & Jiang, XR, J. Vac. Sci. Technol. B 14 (1996). p. 1635.CrossRefGoogle Scholar
[17] K Marianowski, dissertation, Tübingen, 2014..Google Scholar
[19] Many thanks go to Dr. Lothar Bischoff of the FZ Rossendorf for the supply of the gallium LMIS. Funding of part of this work by Bal-TEC AG, Principality of Liechtenstein, is gratefully acknowledged.Google Scholar