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Expanding the Energy Range from eV to MeV and Fabrication of Sources Enabling Novel Focused Ion Beam Nanofabrication and Modification

Published online by Cambridge University Press:  22 July 2022

Michael Titze ,
Aaron Katzenmeyer ,
Vigneshwaran Chandrasekaran ,
Anthony Flores ,
Barney Doyle ,
Yongqiang Wang ,
Han Htoon  and
Edward Bielejec
Michael Titze
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Aaron Katzenmeyer
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Vigneshwaran Chandrasekaran
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Anthony Flores
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Barney Doyle
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Yongqiang Wang
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Han Htoon
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Edward Bielejec
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 6 - 8
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Copyright
Copyright © Microscopy Society of America 2022

References

Titze, M. et al. , arXiv:2112.02049Google Scholar
Lozovoi, A. et al. , Nat. Electron., 4, 717 (2021)10.1038/s41928-021-00656-zCrossRefGoogle Scholar
Doyle, B. L., Peercy, P. S., Appl. Phys. Lett. 34, 811 (1979)Google Scholar
SNL is managed and operated by NTESS under DOE NNSA contract DE-NA0003525. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science.Google Scholar