Evolution of Surface Morphology during Focused Ion Beam Sputtering and Gas-assisted Sputtering Processes

D. P. Adams

doi:10.1017/S1431927603440956

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Evolution of Surface Morphology during Focused Ion Beam Sputtering and Gas-assisted Sputtering Processes

Published online by Cambridge University Press: 06 August 2003

D. P. Adams

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D. P. Adams*: Affiliation:
Sandia National Laboratories, MS 0959, Albuquerque, NM, 87185

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 114 - 115

DOI: https://doi.org/10.1017/S1431927603440956 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2003

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Evolution of Surface Morphology during Focused Ion Beam Sputtering and Gas-assisted Sputtering Processes

Volume 9, Issue S02
D. P. Adams ^(a1)
DOI: https://doi.org/10.1017/S1431927603440956

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Evolution of Surface Morphology during Focused Ion Beam Sputtering and Gas-assisted Sputtering Processes

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