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Evaporation Dynamics of Boron Dopants in Silicon

Published online by Cambridge University Press:  30 July 2021

Jonathan Op de Beeck ,
Christoph Freysoldt ,
Ramya Cuduvally ,
Jeroen Scheerder ,
Richard J. H. Morris ,
Paul van der Heide ,
Wilfried Vandervorst  and
Claudia Fleischmann
Jonathan Op de Beeck
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001Leuven, Belgium, Belgium
Christoph Freysoldt
Affiliation:
Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Straße 1, 40237Düsseldorf, Germany, United States
Ramya Cuduvally
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium,Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001Leuven, Belgium, United States
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, United States
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001Leuven, Belgium, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium,Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001Leuven, Belgium, Belgium

Abstract

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Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 418 - 420
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Da Costa, G., Wang, H., Duguay, S., Bostel, A., Blavette, D. & Deconihout, B. (2012). Advance in multi-hit detection and quantization in atom probe tomography. Review of Scientific Instruments 83, 123709.Google ScholarPubMed
Cuduvally, R., Morris, R. J. H., Ferrari, P., Bogdanowicz, J., Fleischmann, C., Melkonyan, D. & Vandervorst, W. (2020). Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs. Ultramicroscopy 210, 112918.CrossRefGoogle Scholar
Martin, A. J. & Yatzor, B. (2019). Examining the Effect of Evaporation Field on Boron Measurements in SiGe: Insights into Improving the Relationship Between APT and SIMS Measurements of Boron. Microscopy and Microanalysis 25, 617–624.Google ScholarPubMed