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Estimation of the Electron Beam Energy Spread for TEM Information Limit

Published online by Cambridge University Press:  01 August 2002

Michael A. O'Keefe ,
Peter C. Tiemeijer  and
Maxim V. Sidorov
Michael A. O'Keefe
Affiliation:
National Center for Electron Microscopy, LBNL B72, One Cyclotron Road, Berkeley, CA 94720, USA
Peter C. Tiemeijer
Affiliation:
FEI Electron Optics, Building AAEp, PO Box 80066, 5600 KA Eindhoven, The Netherlands
Maxim V. Sidorov
Affiliation:
Advanced Micro Devices, One AMD Place, P.O. Box 3453, M/S 32, Sunnyvale CA 94088, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 480 - 481
Copyright
Copyright © Microscopy Society of America 2002