Hostname: page-component-cd9895bd7-jkksz Total loading time: 0 Render date: 2024-12-26T06:04:32.719Z Has data issue: false hasContentIssue false
  • English
  • Français

ESEM Imaging of P-N Junctions Using a Gaseous Secondary ElectronDetector

Published online by Cambridge University Press:  02 July 2020

M.R. Phillips ,
M. Toth  and
D. Drouin
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney PO Box 123, Broadway, NSW, 2007 Australia, [email protected]
M. Toth
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney PO Box 123, Broadway, NSW, 2007 Australia, [email protected]
D. Drouin
Affiliation:
Départment de génie electrique et génie informatique, Université de Sherbrooke, Sherbrooke, Québec, Canada, J1K 2R1
Get access

Extract

Contrast in secondary electron images of p-n junctions has been observed using a FESEM operating at 1kV. This contrast has been attributed to energy band-bending effects and dopant level variations. In this paper, we report that contrast from the depletion layer of a p-n junction can be obtained in an ESEM using a gaseous secondary electron detector (GSED). The contrast is caused by a signal induced in the GSED by charging and discharging of the device.

A 1N4002 p+pn silicon power diode was cross-sectioned along the lead axis to expose the Ag ohmic contacts and the semiconductor device. The section was mechanically polished to an optical finish using diamond abrasives and mounted in a holder which allowed electrical connection to both the p and n sides of the diode. Imaging experiments were performed in a Philips Electroscan XL30 ESEM and a JEOL 6300F below-lens FESEM. Current images were obtained with a GW Electronics 103 specimen current amplifier.

Type
Environmental Scanning Electron Microscopy and Other Wet Work
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 288 - 289
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

references

1Perovic, D.D.et al., Ultramicroscopy, 13 (1995)104CrossRefGoogle Scholar
2Venables, D., Microscopy and Microanalysis, 4(Suppl 2) (1998)644CrossRefGoogle Scholar
3Venables, D. and Maher, D.M., J. Vac. Sci. and Technol. B 14(1996)421CrossRefGoogle Scholar