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Enhancement of SEM/EDS Analysis Using FIB Sample Preparation

Published online by Cambridge University Press:  02 July 2020

C.B. Vartuli ,
F.A. Stevie ,
J.B. Bindell ,
T.L. Shofner  and
B.M. Purcell
C.B. Vartuli
Affiliation:
Lucent Technologies, 9333 S John Young Parkway, Orlando, FL32819
F.A. Stevie
Affiliation:
Lucent Technologies, 9333 S John Young Parkway, Orlando, FL32819
J.B. Bindell
Affiliation:
Lucent Technologies, 9333 S John Young Parkway, Orlando, FL32819
T.L. Shofner
Affiliation:
Bartech, 9333 S. John Young Pkwy., Orlando, FL32819
B.M. Purcell
Affiliation:
Lucent Technologies, 9333 S John Young Parkway, Orlando, FL32819
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Scanning Electron Microscopy/Energy Dispersive Spectroscopy (SEM/EDS) has become less useful for semiconductor samples as feature dimensions decrease. It has become increasingly difficult to get sufficient signal from small features because of the large interaction volume of the primary beam. As the interaction volume is dependent on the accelerating energy of the primary electron beam, decreasing the accelerating voltage will decrease the interaction volume. This increases the percentage of signal from the feature of interest, but also lowers the number of peaks available for interpretation, reducing the sensitivity of the analysis. Several elements commonly used in the fabrication of semiconductors have overlapping peaks at lower energies, and the ability to distinguish between them is lost at low accelerating energies. It is possible to modify samples using Focused Ion Beam (FIB) to improve EDS resolution without decreasing the accelerating voltage.

The samples were prepared in an FIE 800 FIB and imaged in an Hitachi S-4700 SEM.

Type
Precision Specimen Preparation
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 896 - 897
Copyright
Copyright © Microscopy Society of America

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