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Energy Contrast from Si Low Loss at 74 eV for Semiconductor Devices

Published online by Cambridge University Press:  22 July 2003

Lancy Tsung ,
Doug Matheson ,
Chris Skelton ,
Robert Turner  and
Jan Ringnalda
Lancy Tsung
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 7524
Doug Matheson
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 7524
Chris Skelton
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 7524
Robert Turner
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 7524
Jan Ringnalda
Affiliation:
FEI Company, 7451 NW Evergreen Parkway, Hillsboro OR 9712

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 490 - 491
Copyright
Copyright © Microscopy Society of America 2003