Electron Beam-Induced Sample Contamination in the SEM

A Vladar; M Postek

doi:10.1017/S1431927605507785

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Truchly, Martin Plecenik, Tomas Secianska, Katarina Gregor, Maros Zahoran, Miroslav Vargova, Melinda Mikula, Marian Grancic, Branislav Plesch, Gustav Tofail, Syed A.M. Kus, Peter and Plecenik, Andrej 2013. Surface potential patterning of hydroxyapatite films by focused electron beam: Influence of the electron energy. Applied Surface Science, Vol. 269, Issue. , p. 184.

Mohammadi, Vahid Qi, Lin Golshani, Negin Mok, Caroline K. R. de Boer, Wie Be Sammak, Amir Derakhshandeh, Jaber van der Cingel, Johan and Nanver, Lis K. 2013. VUV/Low-Energy Electron Si Photodiodes With Postmetal 400<formula formulatype="inline"> <tex Notation="TeX">$^{\circ}{\rm C}$</tex></formula> PureB Deposition. IEEE Electron Device Letters, Vol. 34, Issue. 12, p. 1545.

Attota, Ravikiran and Dixson, Ronald G. 2014. Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes. Applied Physics Letters, Vol. 105, Issue. 4,

Wan, Jiahuan Xu, Linyan Wu, Sen and Hu, Xiaodong 2014. Investigation on Blind Tip Reconstruction Errors Caused by Sample Features. Sensors, Vol. 14, Issue. 12, p. 23159.

Hartmann, S. Blaudeck, T. Hölck, O. Hermann, S. Schulz, S. E. Gessner, T. and Wunderle, B. 2014. Quantitative in-situ scanning electron microscope pull-out experiments and molecular dynamics simulations of carbon nanotubes embedded in palladium. Journal of Applied Physics, Vol. 115, Issue. 14,

Flater, Erin E. Zacharakis-Jutz, George E. Dumba, Braulio G. White, Isaac A. and Clifford, Charles A. 2014. Towards easy and reliable AFM tip shape determination using blind tip reconstruction. Ultramicroscopy, Vol. 146, Issue. , p. 130.

M.Gregor Plecenik, T. Tofail, S.A.M. Zahoran, M. Truchly, M. Vargova, M. Laffir, F. Plesch, G. Kus, P. and Plecenik, A. 2015. Hydrophobicity of electron beam modified surface of hydroxyapatite films. Applied Surface Science, Vol. 337, Issue. , p. 249.

Mohammadi, V. Shi, L. Kroth, U. Laubis, C. and Nihtianov, S. 2015. Stability characterization of high-performance PureB Si-photodiodes under aggressive cleaning treatments in industrial applications. p. 3370.

Vladár, András 2016. Metrology and Diagnostic Techniques for Nanoelectronics. p. 3.

Qu, Juntian Lee, Martin Hilke, Michael and Liu, Xinyu 2017. Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance ofin situnanoprobing. Nanotechnology, Vol. 28, Issue. 34, p. 345702.

Leng, Haixu Szychowski, Brian Daniel, Marie-Christine and Pelton, Matthew 2017. Dramatic Modification of Coupled-Plasmon Resonances Following Exposure to Electron Beams. The Journal of Physical Chemistry Letters, Vol. 8, Issue. 15, p. 3607.

Szczerbiński, Jacek Gyr, Luzia Kaeslin, Jérôme and Zenobi, Renato 2018. Plasmon-Driven Photocatalysis Leads to Products Known from E-beam and X-ray-Induced Surface Chemistry. Nano Letters, Vol. 18, Issue. 11, p. 6740.

Monteiro, Mariana C.O. and Koper, Marc T.M. 2019. Alumina contamination through polishing and its effect on hydrogen evolution on gold electrodes. Electrochimica Acta, Vol. 325, Issue. , p. 134915.

Yuan, Zhishan Lei, Xin and Wang, Chengyong 2020. Controllable fabrication of solid state nanopores array by electron beam shrinking. International Journal of Machine Tools and Manufacture, Vol. 159, Issue. , p. 103623.

Gacka, Ewelina Kunicki, Piotr Sikora, Andrzej Bogdanowicz, Robert Ficek, Mateusz Gotszalk, Teodor Rangelow, Ivo W. and Kwoka, Krzysztof 2022. Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy. Measurement, Vol. 188, Issue. , p. 110373.

Turchetti, Marco Yang, Yujia Bionta, Mina Nardi, Alberto Daniel, Luca Berggren, Karl K. and Keathley, Phillip D. 2022. Electron Emission Regimes of Planar Nano Vacuum Emitters. IEEE Transactions on Electron Devices, Vol. 69, Issue. 7, p. 3953.

Nohl, James F. Farr, Nicholas T.H. Sun, Yige Hughes, Gareth M. Cussen, Serena A. and Rodenburg, Cornelia 2022. Low-voltage SEM of air-sensitive powders: From sample preparation to micro/nano analysis with secondary electron hyperspectral imaging. Micron, Vol. 156, Issue. , p. 103234.

Wang, Jie Wu, Mengjuan and Hou, Xianghui 2022. Study on the influencing factors of spontaneous wettability transition behaviour on metallic-based surfaces. Vacuum, Vol. 200, Issue. , p. 111048.

Wang, Xiang Luo, Chan Reeves, Stacey and Soto, Isael 2022. Wafer charging quantification using image distortion. Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 22, Issue. 02,

Abdel-Rahman, Mohammed K. Eckhert, Patrick M. and Fairbrother, D. Howard 2022. Ion-Induced Surface Reactions and Deposition of Trimethyl(methylcyclopentadienyl)platinum(IV). The Journal of Physical Chemistry C, Vol. 126, Issue. 37, p. 15724.

Download full list

Article contents

Electron Beam-Induced Sample Contamination in the SEM

Extract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests